Dynamic pull-in of parallel-plate and torsional electrostatic MEMS actuators

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 811-821

  Nielson, Gregory N ^a   Barbastathis, George ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Electrostatic devices; Microactuators; Microelectromechanical systems (MEMS); Microresonators; Nonlinear systems; Switches

Indexed keywords

ELECTRIC POTENTIAL; MICROACTUATORS; OSCILLATORS (ELECTRONIC); RESONATORS; STIFFNESS; SWITCHES;

DYNAMIC PULL-IN; MICRORESONATORS; TORSIONAL ELECTROSTATIC MICROELECTROMECHANICAL SYSTEMS;

ELECTROSTATIC ACTUATORS;

EID: 33747415110     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.879121     Document Type: Article

References (20)

1. R. Sattler, F. Plötz, G. Fattinger, and G. Wachutka, "Modeling of an electrostatic torsional actuator: Demonstrated with an RF MEMS switch," Sens. Actuators A, Phys., vol. 97-98, pp. 337-346, April 2002.
2. G. N. Nielson, "Micro-Opto-Mechanical Switching and Tuning for Integrated Optical Systems," Ph.D. dissertation, Dept. Mech. Eng., MIT, Cambridge, MA, 2004.
3. O. Solgaard, S. F. A. Sandejas, and D. M. Bloom, "Deformable grating optical modulator," Opt. Lett., vol. 17, no. 9, pp. 688-690, May 1992.
4. G. A. Feather and D. W. Monk, "The digital micromirror device for projection display," in Proc. IEEE 7th Annu. Int. Conf. Wafer Scale Integration, 1995, pp. 43-51.
5. G. M. Rebeiz, RF MEMS Theory, Design, and Technology. Hoboken, NJ: Wiley, 2003.
6. J. B. Muldavin and G. M. Rebeiz, "Nonlinear electro-mechanical modeling of MEMS switches," in Proc. IEEE MTT-S Int. Microwave Symp. Digest, 2001, vol. 3, pp. 2119-2122.
7. L. M. Castañer and S. D. Senturia, "Speed-energy optimization of electrostatic actuators based on pull-in," IEEE J. Microelectromech. Syst., vol. 8, no. 3, pp. 290-298, Sep. 1999.
8. J. B. Starr, "Squeeze-film damping in solid-state accelerometers," in Proc. Solid-State Sensor and Actuator Workshop (Tech. Dig.), 1990, pp. 44-47.
9. T. Veijola, H. Kuisma, and J. Lahdenpera, "Model for gas film damping in a silicon accelerometer," in Int. Conf. Solid-State Sensor and Actuators (Transducers '97), 1997, vol. 2, pp. 1097-1100.
10. S. D. Senturia, Microsystem Design. Norwell, MA: Kluwer, 2001.
11. M. I. Younis and A. H. Nayfeh, "A study of the nonlinear response of a resonant microbeam to an electric actuation," Nonlinear Dyn., vol. 31, no. 1, pp. 91-117, Jan. 2003.
12. E. K. Chan, E. C. Kan, R. W. Dutton, and P. M. Pinsky, "Nonlinear dynamic modeling of micromachined microwave switches," in Proc. IEEE MTT-S Int. Microwave Symp. Digest, 1997, pp. 1511-1514.
13. Y. Choi, K. Kim, and M. G. Allen, "A magnetically actuated, electrostatically clamped high current MEMS switch," in Proc. ASME 2001 Int. Mechanical Engineering Congr. Exposition, MEMS, 2001, vol. 3, pp. 83-87.
14. S. R. Bhalotra, J. D. Mansell, H. L. Kung, and D. A. B. Miller, "Parallel-plate MEMS mirror design for large on-resonance displacement," in Proc. IEEE/LEOS 2000 Int. Conf. Optical MEMS, 2000, pp. 93-94.
15. J. M. T. Thompson and H. B. Stewart, Nonlinear Dynamics and Chaos, 2nd ed. West Sussex, U.K.: Wiley, 2002.
16. D. Peroulis, S. P. Pacheco, K. Sarabandi, and L. P. B. Katehi, "Electromechanical considerations in developing low-voltage RF MEMS switches," IEEE Trans. Microw. Theory Tech., vol. 51, no. 1, pp. 259-270, Jan. 2003.
17. F. D. Bannon, III, J. R. Clark, and C. T.-C. Nguyen, "High-Q HF microelectromechanical filters," IEEE J. Solid-State Circuits, vol. 35, no. 4, pp. 512-526, Apr. 2000.
18. C. T.-C. Nguyen, "Frequency-selective MEMS for miniaturized low-power communication devices," IEEE Trans. Microw. Theory Tech., vol. 47, no. 8, pp. 1486-1503, Aug. 1999.
19. J. Bienstman, H. A. C. Tilmans, E. J. E. A. Peeters, M. Steyaert, and R. Puers, "An oscillator circuit for electrostatically driven silicon-based one-port resonators," Sens. Actuators A, Phys., vol. 52, no. 1-3, pp. 179-186, Mar. 1996.
20. H. A. C. Tilmans and R. Legtenberg, "Electrostatically driven vacuum-encapsulated polysilicon resonators Part II. Theory and performance," Sens. Actuators A, Phys., vol. 45, no. 1, pp. 67-84, Oct. 1994.