Vibration analysis of micro-machined beam-type resonators

Journal of Sound and Vibration

Volumn 308, Issue 1-2, 2007, Pages 287-301

  Hassanpour, P A ^a   Cleghorn, W L ^a   Esmailzadeh, E ^b   Mills, J K ^a  

^a UNIVERSITY OF TORONTO   (Canada)

^b UNIVERSITY OF ONTARIO INSTITUTE OF TECHNOLOGY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AXIAL LOADS; MICROMACHINING; NATURAL FREQUENCIES; PARAMETER ESTIMATION; PROBLEM SOLVING; VIBRATION ANALYSIS;

CONCENTRATED ROTARY MASS; DOUBLE-ENDED TUNING FORK (DETF) MICRO-STRUCTURES; ELECTROSTATIC COMB-DRIVE EXCITERS; VIBRATION PROBLEM;

RESONATORS;

EID: 34548650085     PISSN: 0022460X     EISSN: 10958568     Source Type: Journal    
DOI: 10.1016/j.jsv.2007.07.043     Document Type: Article

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