Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique

Acta Materialia

Volumn 57, Issue 6, 2009, Pages 1768-1776

  Massl, S ^a   Thomma, W ^a   Keckes, J ^b   Pippan, R ^a  

^a ERICH SCHMID INSTITUTE OF MATERIALS SCIENCE   (Austria)

^b UNIVERSITY OF LEOBEN   (Austria)

Author keywords

Fracture; Grain boundaries; Residual stresses; Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; BRITTLENESS; FOCUSED ION BEAMS; FRACTURE; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MAGNETRONS; METALLIC FILMS; NANOCANTILEVERS; RESIDUAL STRESSES; SEMICONDUCTING SILICON COMPOUNDS; STRENGTH OF MATERIALS; THIN FILMS; TIN; TITANIUM COMPOUNDS; TITANIUM NITRIDE;

CANTILEVER BENDING; COMPRESSIVE RESIDUAL STRESS; DEPTH PROFILES; FRACTURE PROPERTIES; GRAIN-BOUNDARY STRENGTHS; IN-SITU; LOAD-DEFLECTION CURVES; STRESS GRADIENTS; TIN FILMS;

FRACTURE TOUGHNESS;

EID: 60849106966     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2008.12.018     Document Type: Article

References (47)

1. Weppelmann E., and Swain M.V. Thin Solid Films 286 (1996) 111
2. Ma L.W., Cairney J.M., Hoffman M., and Munroe P.R. Surf Coat Technol 192 (2005) 11
3. Bhowmick S., Xie Z.H., Hoffman M., Jayaram V., and Biswas S.K. J Mater Res 19 (2004) 2616
4. Xie Z.H., Hoffman M., Moon R.J., and Munroe P.R. J Mater Res 21 (2006) 437
5. Xie Z.H., Hoffman M., Munroe P., Singh R., Benadavid A., and Martin P.J. J Mater Res 22 (2007) 2312
6. Kim K.H., Han D.-S., and Kim S.K. Surf Coat Technol 163-164 (2003) 605
7. Ichimura H., and Ishii Y. Surf Coat Technol 165 (2003) 1
8. Kamiya S., Hanyu H., Amaki S., and Yanase H. Surf Coat Technol 202 (2007) 1154
9. Jaeger G., Endler I., Heilmaier M., Bartsch K., and Leonhardt A. Thin Solid Films 377-378 (2000) 382
10. Zhang T.Y., Su Y.J., Qian C.F., Zhao M.H., and Chen L.Q. Acta Mater 48 (2000) 2843
11. Jonnalagadda K., Cho S.W., Chasiotis I., Friedmann T., and Sullivan J. J Mech Phys Solids 56 (2008) 388
12. Bhowmick S., Jayaram V., and Biswas S.k. Acta Mater 53 (2005) 2459
13. Jayaram V., Bhowmick S., Xie Z.H., Math S., Hoffman M., and Biswas S.K. Mater Sci Eng A 423 (2006) 8
14. Köstenbauer H., Fontalvo G.A., Kapp M., Keckes J., and Mitterer C. Surf Coat Technol 201 (2007) 4777
15. Massl S., Keckes J., and Pippan R. Acta Mater 55 (2007) 4835
16. Freund LB, Suresh S, Thin film materials. Cambridge: Cambridge University Press; 2003, p. 244.
17. Mendibide C., Steyer P., Esnouf C., Goudenau P., Thiaudiere D., Gailhanou M., and Fontane J. Surf Coat Technol 200 (2005) 165
18. Kitamura T., Hirakata H., and Itsuji T. Eng Fract Mech 70 (2003) 2089
19. An J., and Zhang Q.Y. Surf Coat Technol 200 (2005) 2451
20. Barshilia H.C., Deepthi B., Prabhu A.S.A., and Rajam K.S. Surf Coat Technol 201 (2006) 329
21. Bedell S.W., Reznicek A., Fogel K., Ott J., and Sadana D.K. Mater Sci Semicon Proc 9 (2006) 423
22. Carlotti G., Doucet L., and Dupeux M. Thin Solid Films 296 (1997) 102
23. Novotna Z., Kralova R., Novak R., and Marek J. Surf Coat Technol 116-119 (1999) 424
24. Comins J.D., Pang W., Every A.G., and Pietersen D. Refract Met Hard Mater 16 (1998) 389
25. Haider J., Rahman M., Corcoran B., and Hashmi M.S.J. Mater Proc Technol 168 (2005) 36
26. Bamber M.J., Cooke K.E., Mann A.B., and Derby B. Thin Solid Films 398-399 (2001) 299
27. Kim S.H. Mater Lett 16 (2007) 3589
28. Huang Z., Leighton G., Wright R., Duval F., Chung H.C., Kirby P., et al. Sens Actuators A 135 (2007) 660
29. Zhang J. J Mater Proc Technol 123 (2002) 329
30. Antunes J.M., Fernandes J.V., Sakharova N.A., Oliveira M.C., and Menezes L.F. Int J Solids Struct 44 (2007) 8313
31. Tran M.D., Poublan J., and Dautzenberg J.H. Thin Solid Films 308-309 (1997) 310
32. Eiper E., Martinschitz K.J., and Keckes J. Powder Differ 21 (2006) 25
33. Resnik D., Aljancic U., Vrtacnik D., Mozek M., and Amon S. Vacuum 80 (2005) 236
34. Dieing T., and Usher B.F. Phys Rev B 67 (2003) 054108
35. Picard D., Leguillon D., and Putot C. J Eur Cer Soc 26 (2006) 1421
36. Murakami Y. Stress Intensity Factors Handbook, Vol 4. Oxford: Pergamon Press; 2001. pp. 111.
37. Grabner L. J Appl Phys 49 (1978) 580
38. Dietrich B., and Dombrowski K.F. J Raman Spectr 30 (1999) 893
39. De Wolf I. J Raman Spectr 30 (1999) 877
40. Atkinson A., and Jain S.C. J Raman Spectr 30 (1999) 885
41. Genzel C. Mater Sci Technol 21 (2005) 10
42. Marques M.J., Pina J., Dias A.M., Lebrun J.L., and Feugeas J. Surf Coat Technol 195 (2005) 8
43. Ma C.H., Huang J.H., and Chen H. Thin Solid Films 418 (2002) 73
44. Noyan I.C., and Cohen J.B. Residual stress (1987), Springer, New York
45. Ziegler JF, Biersack JP, Littmark U. The stopping range of ions in matter. New York: Pergamon Press; 1985, p. 321.
46. Kamiya S., Nagasawa H., Yamanobe K., and Saka M. Thin Solid Film 473 (2005) 123
47. Qin M., Ju D.Y., Wu Y.N., Sun C., and Li J.B. Mater Charact 56 (2006) 208