Investigation of the stresses and stress intensity factors responsible for fracture of thin protective films during ultra-micro indentation tests with spherical indenters

Thin Solid Films

Volumn 286, Issue 1-2, 1996, Pages 111-121

  Weppelmann, E ^a,d   Swain, M V ^b,c  

^a FRAUNHOFER INSTITUTE FOR MECHANICS OF MATERIALS IWM   (Germany)

^b CSIRO   (Australia)

^c UNIVERSITY OF SYDNEY   (Australia)

^d NONE   (Germany)

Author keywords

Physical vapour deposition (PVD); Stress; Thin films

Indexed keywords

FRACTURE; FRACTURE TESTING; PROTECTIVE COATINGS; STRESS INTENSITY FACTORS; STRESSES; VAPOR DEPOSITION;

MICRO-INDENTATION TEST; SPHERICAL INDENTERS; THIN HARD FILMS;

THIN FILMS;

EID: 0042125215     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(95)08525-4     Document Type: Article

References (20)

1. M.F. Doerner and W.D. Nix, J. Mater. Res., 1 (1986) 601-609.
2. W.C. Oliver and G.M. Pharr, J. Mater. Res., 7 (1992) 1564-1583.
3. J.L. Loubet, M. Bauer, A. Tonck, S. Bec and B. Gauthier-Manuel, Proc. of the NATO-ASI, Portugal, June/July(1992), Kluwer Academic, Netherland, 1993, pp. 429-447.
4. J. Mencík and M.V. Swain, Mater. Forum, 18 (1994) 277-288.
5. T.W. Wu, R.A. Burn, M.M. Chen and P.S. Alexopoulos, Mater. Res. Soc. Symp. Proc., 130 (1989) 117-122.
6. M. Samandi, T.J. Bell and M.V. Swain, Mater. Res. Soc. Symp. Proc., 239 (1991) 355-360.
7. J.C. Knight, A.J. Whitehead and T.F. Page, J. Mater. Sci., 27 (1992) 3939-3952.
8. A.J. Whitehead and T.F. Page, Thin Solid Films, 220 (1992) 277-283.
9. J.L. Loubet, J.M. Georges and Ph. Kapsa, Mechanics of Coatings, Elsevier, Amsterdam, 1990, pp. 429-434.
10. G.M. Pharr, D.S. Harding and W.C. Oliver, Proc. NATO-ASI, Portugal, June/July (1992), Kluwer Academic, Netherland, 1993, pp. 449-461.
11. V.A.C. Haanapple, D.v.d. Vendel, H.S.C. Metselaar, H.D. van Corbach, T. Fransen and P.J. Gellings, Thin Solid Films, 254 (1995) 153-163.
12. E.R. Weppelmann, X.-Z. Hu and M.V. Swain, J. Adhesion Sci. Technol., 8 (1994) 611-624.
13. M. Shiwa, E.R. Weppelmann, A. Bendeli, M.V. Swain, D. Munz and T. Kishi, Surf. Coatings Technol., 68/69 (1994) 598-602.
14. M.V. Swain and J. Menćk, Thin Solid Films, 253 (1994) 204-211.
15. S. van der Zwaag and J.E. Field, Philos. Mag. A, 46 (1982) 133-150.
16. H. Djabella and R.D. Arnell, Thin Solid Films, 213 (1992) 205-219.
17. H. Djabella and R.D. Arnell, Thin Solid Films, 213 (1993) 98-108.
18. T. Fett and D. Munz, Stress Intensity Factors and Weight Functions for One-dimensional Cracks, Forschungszentrum Karlsruhe, Dezember 1994, KfK 5290.
19. T. Fett, E. Diegele, D. Munz and G. Rizzi, personal communications.
20. D. Munz and T. Fett, Mechanisches Verhalten keramischer Werkstoffe, Werkstoff-Forschung und -Technik 8, Springer Verlag, Berlin, 1989.