The correlation between surface acoustic wave velocity and mechanical properties of TiN and TiNx coatings

International Journal of Refractory Metals and Hard Materials

Volumn 16, Issue 4-6, 1998, Pages 389-394

  Comins, J D ^a   Pang, W ^a   Every, A G ^a   Pietersen, D ^b  

^a UNIVERSITY OF THE WITWATERSRAND   (South Africa)

^b NECSA   (South Africa)

Author keywords

Brillouin scattering; Elastic properties; Thin films; TiN

Indexed keywords

ACOUSTIC WAVE VELOCITY; COATINGS; CORRELATION METHODS; ELASTICITY; SURFACE WAVES; THIN FILMS;

SURFACE ACOUSTIC WAVES;

TITANIUM NITRIDE;

EID: 0032315048     PISSN: 02634368     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0263-4368(98)00045-6     Document Type: Article

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