Simulation of thermal stress in magnetron sputtered thin coating by finite element analysis

Journal of Materials Processing Technology

Volumn 168, Issue 1, 2005, Pages 36-41

  Haider, Julfikar ^a   Rahman, Mahfujur ^a   Corcoran, Brian ^a   Hashmi, M S J ^a  

^a DUBLIN CITY UNIVERSITY   (Ireland)

Author keywords

FEM; PVD; Thermal stress; Thin coating; TiN

Indexed keywords

COATING TECHNIQUES; FINITE ELEMENT METHOD; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; SPUTTER DEPOSITION; TEMPERATURE DISTRIBUTION; THICKNESS MEASUREMENT; TITANIUM COMPOUNDS;

AXIAL STRESS; ROOM TEMPERATURE; STRESS STATE; THIN COATING;

THERMAL STRESS;

EID: 24044460807     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2004.09.093     Document Type: Article

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