Determination of piezoelectric coefficients and elastic constant of thin films by laser scanning vibrometry techniques

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 660-665

  Huang, Z ^a   Leighton, G ^a   Wright, R ^a   Duval, F ^a   Chung, H C ^a   Kirby, P ^a   Whatmore, R W ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Interferometer; Laser scanning vibrometer; Piezoelectric coefficients; PZT; Sol gel

Indexed keywords

ELASTIC CONSTANTS; FINITE ELEMENT METHOD; INTERFEROMETERS; LASER APPLICATIONS; MEMS; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; SOL-GELS;

LASER SCANNING VIBROMETERS; LASER SCANNING VIBROMETRY TECHNIQUES; PIEZOELECTRIC COEFFICIENTS;

THIN FILMS;

EID: 34047166048     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.10.002     Document Type: Article

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