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Journal of Raman Spectroscopy

Volumn 30, Issue 10, 1999, Pages 885-891

Spatially resolved stress analysis using raman spectroscopy

(2) Atkinson, A a Jain, S C b

a IMPERIAL COLLEGE LONDON (United Kingdom)

b IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; LASER BEAMS; SEMICONDUCTOR QUANTUM WIRES; SI-GE ALLOYS; SILICON COMPOUNDS; SPECTRUM ANALYSIS; STRESS ANALYSIS;

ELECTRONIC DEVICE STRUCTURES; FOCUSED LASER BEAMS; HIGH SPATIAL RESOLUTION; LASER MICROPROBE; MICRO-ELECTRONIC DEVICES; MICRO-RAMAN; NANOMETRES; SPATIALLY RESOLVED; STRESSES ANALYSIS; STRESSES DISTRIBUTION;

RAMAN SPECTROSCOPY;

EID: 0001404276 PISSN: 03770486 EISSN: None Source Type: Journal
DOI: 10.1002/(sici)1097-4555(199910)30:10<885::aid-jrs485>3.3.co;2-x Document Type: Article

Times cited : (81)

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