Effect of intrinsic stress gradient on the effective mode-I fracture toughness of amorphous diamond-like carbon films for MEMS

Journal of the Mechanics and Physics of Solids

Volumn 56, Issue 2, 2008, Pages 388-401

  Jonnalagadda, Krishna ^a   Cho, Sung Woo ^b   Chasiotis, Ioannis ^a   Friedmann, Thomas ^c   Sullivan, John ^c  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Virginia   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Fracture; Size effects; Stress gradient; Thin films

Indexed keywords

AMORPHOUS MATERIALS; CARBON FILMS; DIAMONDS; MEMS; THIN FILMS;

BOUNDARY FORCE MEASUREMENTS; CARBON BINDING STOICHIOMETRY; FIXED GRIP CONFIGURATION; INTRINSIC STRESS GRADIENT;

FRACTURE TOUGHNESS;

EID: 38749098612     PISSN: 00225096     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmps.2007.05.013     Document Type: Article

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