Determination of Young's modulus of electroplated nickel-iron (Ni/Fe) and micro-machined Si thin films by the balance method

Journal of Materials Processing Technology

Volumn 123, Issue 3, 2002, Pages 329-335

  Zhang, Jian ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

Balance method; Electroplating; Ni Fe thin films; UV LIGA technology; Young's modulus

Indexed keywords

CANTILEVER BEAMS; ELASTIC MODULI; ELECTROPLATING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON;

MICRO-CANTILEVER BEAMS (MCB);

THIN FILMS;

EID: 85041106620     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(02)00012-2     Document Type: Article

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