Stress measurements in si microelectronics devices using Raman spectroscopy

Journal of Raman Spectroscopy

Volumn 30, Issue 10, 1999, Pages 877-883

  De Wolf, Ingrid ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS; RAMAN SPECTROSCOPY;

LOCAL STRESS; MEASUREMENTS OF; MICRO RAMAN SPECTROSCOPY; MICRO-ELECTRONIC DEVICES; PRACTICAL ISSUES; SILICON MICROELECTRONICS; STRESSES MEASUREMENTS;

STRESS MEASUREMENT;

EID: 0005058304     PISSN: 03770486     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1097-4555(199910)30:10<877::aid-jrs464>3.0.co;2-5     Document Type: Article

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