Self-sacrificial surface micromachining using poly(methyl methacrylate)

Journal of Micromechanics and Microengineering

Volumn 18, Issue 11, 2008, Pages

  Johnstone, R W ^a   Foulds, I G ^a   Parameswaran, M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BUILDING MATERIALS; COMPOSITE MICROMECHANICS; ESTERS; MACHINING; MICROMACHINING; MOLECULAR WEIGHT; SURFACE MICROMACHINING;

AVERAGE MOLECULAR; CHEMICAL CHANGES; DESIGN SPACES; IN-SITU; LOWER AVERAGES; NUMBER OF LAYERS; POLIES (METHYL METHACRYLATE); SACRIFICIAL LAYERS; SACRIFICIAL MATERIALS; STRUCTURAL MATERIALS; UV IRRADIATIONS;

SURFACES;

EID: 58149356985     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/11/115012     Document Type: Article

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