Micro-stereolithography of polymeric and ceramic microstructures

Sensors and Actuators, A: Physical

Volumn 77, Issue 2, 1999, Pages 149-156

  Zhang, X ^a   Jiang, X N ^a   Sun, C ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; COMPUTER AIDED ANALYSIS; COMPUTER CONTROL; LITHOGRAPHY; MICROMACHINING; POLYMERS;

MICROSTEREOLITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 0033344838     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00189-2     Document Type: Article

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