In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layer

Microsystem Technologies

Volumn 13, Issue 3-4, 2007, Pages 253-257

  Ling, Z ^a   Lian, K ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETHERS; FABRICATION; LITHOGRAPHY; ULTRAVIOLET RADIATION;

PHOTOACID GENERATOR (PAG); PROPYLENE GLYCOL MONOMETHYL ETHER ACETATE (PGMEA); SU-8 MOVABLE PARTS; UV LITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 33845805293     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0180-5     Document Type: Conference Paper

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