Automated assembly of hingeless 90° out-of-plane microstructures

Journal of Micromechanics and Microengineering

Volumn 17, Issue 7, 2007, Pages 1314-1325

  Tsang, S H ^a   Sameoto, D ^a   Foulds, I G ^a   Johnstone, R W ^a   Parameswaran, M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; MICROELECTRONICS; RELIABILITY ANALYSIS; SELF ASSEMBLY;

MICROELECTRONICS WIREBONDER; MICROPROBER STATION; POSITIONAL REPEATABILITY; SINGLE POINT ACTUATION;

MICROSTRUCTURE;

EID: 34547567699     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/7/014     Document Type: Article

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