Novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels

Journal of Micromechanics and Microengineering

Volumn 11, Issue 1, 2001, Pages 27-32

  Tay, Francis E H ^a   Van Kan, J A ^a   Watt, F ^a   Choong, W O ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CRYSTAL MICROSTRUCTURE; ELASTIC MODULI; MICROELECTROMECHANICAL DEVICES; POLYMETHYL METHACRYLATES; PROTON IRRADIATION; THICK FILMS;

MICRO-CHANNELS;

MICROMACHINING;

EID: 0035124001     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/1/305     Document Type: Article

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