Deep-UV exposure of poly(methyl methacrylate) at 254 nm using low-pressure mercury vapor lamps

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 2, 2008, Pages 682-685

  Johnstone, Robert W ^a   Foulds, Ian G ^a   Parameswaran, M ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

MERCURY VAPOR LAMPS; THERMAL EFFECTS; THERMOPLASTICS; ULTRAVIOLET RADIATION;

NONAMPLIFIED PMMA FILMS; RADIATION SOURCES;

POLYMETHYL METHACRYLATES;

EID: 41549112896     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2890688     Document Type: Article

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