A novel fabrication method of embedded micro channels employing simple UV dosage control and antireflection coating

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 69-72

  Tseng, F G ^a   Chuang, Y J ^a   Lin, W K ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; FLUIDIC DEVICES; INTERFACES (MATERIALS); LIGHT ABSORPTION; LIGHT REFLECTION; MICROELECTRONIC PROCESSING; PHOTORESISTS; THIN FILMS; ULTRAVIOLET DEVICES;

MICRO CHANNEL; MICRO FLUIDIC STRUCTURE; ULTRAVIOLET DOSAGE CONTROL; ULTRAVIOLET EXPOSURE;

MICROELECTROMECHANICAL DEVICES;

EID: 0036196925     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)