SU8-micromechanical structures with in situ fabricated movable parts

Microsystem Technologies

Volumn 8, Issue 4-5, 2002, Pages 348-350

  Seidemann, V ^a   Rabe, J ^a   Feldmann, M ^a   Buttgenbach S ^a  

^a Institute for Microtechnology   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTROPLATING; MULTILAYERS; REACTIVE ION ETCHING; THERMAL EXPANSION; VALVES (MECHANICAL);

MICROMECHANICAL STRUCTURES;

COMPOSITE MICROMECHANICS;

EID: 0036692639     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0171-0     Document Type: Article

References (7)

1. Micromachining applications of a high resolution ultrathick photoresist
2. High aspect ratio planar coils embedded in SU8 photoepoxy for MEMS applications
3. A novel fabrication process for 3D meander shaped micro coils in SU8 dielectric and their application to linear micro motors
4. Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist
5. Simple and low cost fabrication of embedded microchannels by using new thick-film photoplastic
6. Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components
7. Application and investigation of in-plane compliant SU8-structures for MEMS