New micro stereo lithography for freely movable 3D micro structure - Super IH process with submicron resolution

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 290-295

  Ikuta, Koji ^a   Maruo, Shoji ^a   Kojima, Syunsuke ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HARDENING; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION;

FREELY MOVABLE THREE DIMENSIONAL MICROSTRUCTURES; THREE DIMENSIONAL MICROFABRICATION PROCESS;

LITHOGRAPHY;

EID: 0031678166     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)