Stereolithography on silicon for microfluidics and microsensor packaging

Microsystem Technologies

Volumn 9, Issue 5, 2003, Pages 319-323

  Tse, L A ^a   Hesketh, P J ^a   Rosen, D W ^a   Gole, J L ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ASSEMBLY; ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; CLEANING; ELECTRON DEVICE TESTING; ELECTRONICS PACKAGING; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON; STEREOCHEMISTRY;

DICING TESTS; FUNCTIONAL TEST; INTERDIGITATED ELECTRODES; MICROFLUIDICS; MICROSENSOR PACKAGING; STEREOLITHOGRAPHY;

LITHOGRAPHY;

EID: 0038346507     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0254-y     Document Type: Article

References (9)

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