Magnetron sputtering of alloy and alloy-based films

Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 47-50

  Musil, J ^a   Vlcek J ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Binary metal alloys; High T structures; Magnetron sputtering; Nanocrystalline and nanocomposite films; Nitrides of binary alloys

Indexed keywords

BINARY ALLOYS; COMPOSITE MATERIALS; CRYSTAL STRUCTURE; GRAIN SIZE AND SHAPE; ION BOMBARDMENT; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; NITRIDES; PHASE TRANSITIONS; SPUTTER DEPOSITION;

NANOCOMPOSITE FILMS;

METALLIC FILMS;

EID: 0345580707     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01567-3     Document Type: Article

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