Plasma enhanced magnetron sputter deposition of Ti-Si-C-N based nanocomposite coatings

Surface and Coatings Technology

Volumn 203, Issue 5-7, 2008, Pages 538-544

  Wei, Ronghua ^a  

^a SOUTHWEST RESEARCH INSTITUTE   (United States)

Author keywords

Erosion resistance; Nanocomposite; Nitrides; Thick coatings; Turbine blades

Indexed keywords

AIR POLLUTION CONTROL EQUIPMENT; CONCENTRATION (PROCESS); DEPOSITION; ELECTRIC GENERATORS; EROSION; GAS TURBINES; ION BOMBARDMENT; IONS; MAGNETRON SPUTTERING; MAGNETRONS; METALLIC MATRIX COMPOSITES; NANOCOMPOSITES; NANOSTRUCTURED MATERIALS; NITRIDES; PLASMA DEPOSITION; PLASMAS; SILICON; SILICON CARBIDE; SOIL MECHANICS; SPUTTER DEPOSITION; TITANIUM COMPOUNDS; TURBINES;

AMORPHOUS SIC; COATING MICROSTRUCTURES; COLUMNAR STRUCTURES; CONVENTIONAL MAGNETRON SPUTTERS; CRACK FORMATIONS; EROSION RESISTANCE; EROSION RESISTANCES; GAS TURBINE COMPRESSORS; GRAIN SIZES; ION CLEANINGS; MAGNETRON PLASMAS; MULTILAYERED COATINGS; N COATINGS; NANOCOMPOSITE COATINGS; NANOCRYSTALLINE; PLASMA ENHANCED MAGNETRON SPUTTERING; PLASMA ENHANCED MAGNETRON SPUTTERS; PROCESSING PARAMETERS; SAND EROSIONS; SI CONCENTRATIONS; THICK COATINGS; TI-6AL-4V; TURBINE BLADES;

COATINGS;

EID: 55749108008     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.05.019     Document Type: Article

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