Deposition and characterization of CrN/Si3N4 and CrAlN/Si3N4 nanocomposite coatings prepared using reactive DC unbalanced magnetron sputtering

Surface and Coatings Technology

Volumn 201, Issue 24, 2007, Pages 9468-9475

  Barshilia, Harish C ^a   Deepthi, B ^a   Rajam, K S ^a  

^a SURFACE ENGINEERING DIVISION   (India)

Author keywords

CrN Si3N4 and CrAlN Si3N4 nanocomposite coatings; Structural and mechanical properties; Thermal stability; Unbalanced magnetron sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; COMPOSITE COATINGS; DEPOSITION; ELASTIC MODULI; HARDNESS; NANOCOMPOSITES; RAMAN SPECTROSCOPY; STRUCTURAL PROPERTIES; THERMODYNAMIC STABILITY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

MICRO-RAMAN SPECTROSCOPY; NANOCOMPOSITE COATINGS; UNBALANCED MAGNETRON SPUTTERING;

MAGNETRON SPUTTERING;

ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; COMPOSITE COATINGS; DEPOSITION; ELASTIC MODULI; HARDNESS; MAGNETRON SPUTTERING; NANOCOMPOSITES; RAMAN SPECTROSCOPY; STRUCTURAL PROPERTIES; THERMODYNAMIC STABILITY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 34548262728     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.04.002     Document Type: Article

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