Structure and mechanical properties of magnetron sputtered Zr-Ti-Cu-N films

Surface and Coatings Technology

Volumn 166, Issue 2-3, 2003, Pages 243-253

  Musil, J ^a   Daniel, R ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Magnetron sputtering; Mechanical properties; Structure; Superhardness; Zr Ti Cu N films

Indexed keywords

CRYSTALLOGRAPHY; HARDNESS; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; STOICHIOMETRY; ZIRCONIUM ALLOYS;

CRYSTALLOGRAPHIC ORIENTATIONS;

THIN FILMS;

FILM;

EID: 0037464378     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00819-8     Document Type: Article

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