Toughness of hard nanostructured ceramic thin films

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5148-5152

  Musil, J ^a   Jirout, M ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Film cracking; Magnetron sputtering; Mechanical properties; Structure; Thin film; Toughness

Indexed keywords

COMPRESSIVE STRESS; CRACK INITIATION; CRYSTAL STRUCTURE; INDENTATION; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; THIN FILMS; TOUGHNESS;

COMPRESSIVE MACROSTRESS; FILM CRACKING; MICROINDENTATION;

CERAMIC MATERIALS;

CERAMIC MATERIALS; COMPRESSIVE STRESS; CRACK INITIATION; CRYSTAL STRUCTURE; INDENTATION; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; THIN FILMS; TOUGHNESS;

EID: 33846484208     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.020     Document Type: Article

References (12)

1. Kuntz J.D., Zhan G.-D., and Mukherjee A.K. MRS Bull. (January 2004) 22
2. Zhang S., Sun D., Fu Y., and Du H. Surf. Coat. Technol. 198 (2005) 2
3. Zhang S., Bui X.L., Zeng X.T., and Li X. Thin Solid Films 482 (2005) 138
4. Jirout M., and Musil J. Surf. Coat. Technol. 200 (2006) 6792
5. Musil J. Surf. Coat. Technol. 125 (2000) 322
6. Musil J., Kunc F., Zeman H., and Polakova H. Surf. Coat. Technol. 154 (2002) 304
7. Musil J., Vlcek J., Regent F., Kunc F., and Zeman H. Key Eng. Mater. 230-232 (2002) 613
8. Tsui T.Y., Pharr G.M., Oliver W.C., Bhatia C.S., White R.L., Anders S., Anders A., and Brown I.G. Mater. Res. Soc. Symp. Proc. 383 (1995) 447
9. Zhang S., Bui X.L., Fu Y., Butler D.L., and Du H. Diamond Relat. Mater. 13 (2004) 867
10. Musil J., Daniel R., Zeman P., and Takai O. Thin Solid Films 478 (2005) 238
11. Musil J., Dohnal P., and Zeman P. J. Vac. Sci. Technol., B 23 4 (Jul/Aug 2005) 1568
12. Musil J., Daniel R., Soldan J., and Zeman P. Surf. Coat. Technol. 200 (2006) 3886