Effects of carbon content and annealing temperature on the microstructure and hardness of super hard Ti-Si-C-N nanocomposite coatings prepared by pulsed d.c. PCVD

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5240-5243

  Guo, Yan ^a   Ma, Shengli ^a   Xu, Kewei ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Annealing; Crystallite size; Microhardness; PCVD; Super hard Ti Si C N nanocomposite coatings

Indexed keywords

ANNEALING; CARBON; CRYSTAL MICROSTRUCTURE; EVAPORATION; MICROHARDNESS; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THERMAL EFFECTS; TITANIUM COMPOUNDS;

CARBON CONTENT; CRYSTALLITE SIZE; NANOCOMPOSITE COATINGS;

INORGANIC COATINGS;

ANNEALING; CARBON; CRYSTAL MICROSTRUCTURE; EVAPORATION; INORGANIC COATINGS; MICROHARDNESS; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THERMAL EFFECTS; TITANIUM COMPOUNDS;

EID: 33846468745     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.122     Document Type: Article

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