Hard and superhard nanocomposite Al-Cu-N films prepared by magnetron sputtering

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 603-609

  Musil, J ^a   Hruby H ^a   Zeman, P ^a   Zeman, H ^a   Cerstvy R ^a   Mayrhofer, P H ^b   Mitterer, C ^b  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

^b Institut fur Metallkunde und Werkstoffprufung   (Austria)

Author keywords

Macrostress; Magnetron sputtering; Mechanical properties; Nc AlNx Cu nanocomposite films; Structure

Indexed keywords

CATHODES; COATINGS; ELASTIC MODULI; FILM PREPARATION; GRANULAR MATERIALS; HARDNESS TESTING; ION BOMBARDMENT; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS;

MAGNETRON CATHODES;

METALLIC FILMS;

COATING; HARDNESS; MICROSTRUCTURE; SPUTTERING;

EID: 0035387862     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01200-2     Document Type: Article

References (12)