Microstructural features of wear-resistant titanium nitride coatings deposited by different methods

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 512-517

  Fortuna, Sergei V ^a   Sharkeev, Yurii P ^b   Perry, Anthony J ^c   Matossian, Jesse N ^d   Shulepov, Ivan A ^e  

^a TOMSK STATE UNIVERSITY   (Russian Federation)

^b RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

^c AIMS Consulting   (Switzerland)

^d Hughes Aircraft Co   (United States)

^e TOMSK POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; MAGNETRON SPUTTERING; RESIDUAL STRESSES; SPUTTER DEPOSITION; TITANIUM NITRIDE; WEAR RESISTANCE;

DECORATIVE COATINGS;

PROTECTIVE COATINGS;

EID: 17444434028     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01438-3     Document Type: Article

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