Influence of the addition of silicon on the structure and properties of chromium nitride coatings deposited by reactive magnetron sputtering assisted by RF plasmas

Surface and Coatings Technology

Volumn 201, Issue 16-17, 2007, Pages 6970-6976

  Mercs, D ^a   Briois, P ^a   Demange, V ^b   Lamy, S ^a   Coddet, C ^a  

^a UNIVERSITÉ DE TECHNOLOGIE DE BELFORT MONTBÉLIARD   (France)

^b UNIVERSITÉ DE LORRAINE   (France)

Author keywords

CrN; CrSiN; Modelling; Reactive magnetron sputtering; Structure

Indexed keywords

CHROMIUM COMPOUNDS; COMPRESSIVE STRESS; COMPUTER SIMULATION; ELASTIC MODULI; HARDNESS; MAGNETRON SPUTTERING; SILICON; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

CHROMIUM NITRIDE COATINGS; NITROGEN ATOMS; SILICON COUPONS;

INORGANIC COATINGS;

CHROMIUM COMPOUNDS; COMPRESSIVE STRESS; COMPUTER SIMULATION; ELASTIC MODULI; HARDNESS; INORGANIC COATINGS; MAGNETRON SPUTTERING; SILICON; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

EID: 34147211860     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.12.028     Document Type: Article

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