Micron-scale friction and sliding wear of polycrystalline silicon thin structural films in ambient air

Journal of Microelectromechanical Systems

Volumn 17, Issue 5, 2008, Pages 1144-1154

  Alsem, Daan Hein ^a   Dugger, Michael T ^b   Stach, Eric A ^c   Ritchie, Robert O ^a,d  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c PURDUE UNIVERSITY   (United States)

^d Lawrence Berkeley National Laboratory   (United States)

Author keywords

Friction; Microelectromechanical systems (MEMS); Silicon; Thin films; Wear

Indexed keywords

DEBRIS; FRICTION; POLYSILICON; SILICON; SURFACE ROUGHNESS; THICKNESS MEASUREMENT; TRIBOLOGY;

ADHESIVE WEARS; AMBIENT AIR; FRICTION CO-EFFICIENT; MACRO SCALES; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROMETER DIMENSIONS; MICRON-SCALE; NORMAL LOADS; ON CHIPS; ORDERS-OF-MAGNITUDE; POLY-CRYSTALLINE SILICON; SHARP INCREASE; SLIDING WEAR; STATIC FRICTION; STEADY-STATE REGIMES; STRUCTURAL FILMS; TEST SPECIMENS; THIN FILMS; WEAR; WEAR COEFFICIENTS; WEAR DEBRIS; WEAR MECHANISMS;

WEAR RESISTANCE;

EID: 53649090475     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.927751     Document Type: Article

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