Measurement of static and dynamic friction coefficients of sidewalls of bulk-microfabricated MEMS devices with an on-chip micro-tribotester

Sensors and Actuators, A: Physical

Volumn 135, Issue 2, 2007, Pages 863-869

  Guo, Zhanshe ^a   Meng, Yonggang ^b   Wu, Hao ^b   Su, Caijun ^b   Wen, Shizhu ^b  

^a BEIHANG UNIVERSITY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Bonding process; Dynamic frictional coefficient; ICP technology; Micro tribotester; Static frictional coefficient

Indexed keywords

BONDING; FRICTION METERS; MICROPROCESSOR CHIPS; SILICON; SINGLE CRYSTAL SURFACES; TRIBOLOGY;

DYNAMIC FRICTIONAL COEFFICIENT; MICRO TRIBOTESTER; STATIC FRICTIONAL COEFFICIENT;

MEMS;

EID: 34047104134     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.10.008     Document Type: Article

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