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Volumn 135, Issue 2, 2007, Pages 863-869

Measurement of static and dynamic friction coefficients of sidewalls of bulk-microfabricated MEMS devices with an on-chip micro-tribotester

Author keywords

Bonding process; Dynamic frictional coefficient; ICP technology; Micro tribotester; Static frictional coefficient

Indexed keywords

BONDING; FRICTION METERS; MICROPROCESSOR CHIPS; SILICON; SINGLE CRYSTAL SURFACES; TRIBOLOGY;

EID: 34047104134     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.10.008     Document Type: Article
Times cited : (22)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.