Microscale tribology (friction) measurement and influence of crystal orientation and fabrication process

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 657-661

  Chen, Quanfang ^a   Carman, Greg P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CRYSTAL ORIENTATION; TRIBOLOGY; WEAR OF MATERIALS;

MICROSCALE TRIBOLOGY MEASUREMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0033692414     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)