Microtribological studies of doped single-crystal silicon and polysilicon films for MEMS devices

Sensors and Actuators, A: Physical

Volumn 57, Issue 2, 1996, Pages 91-102

  Bhushan, Bharat ^a   Koinkar, Vilas N ^a  

^a Ohio State University   (United States)

Author keywords

Atomic force microscopy; Friction; Friction force microscopy; Indentation hardness; Microelectromechanical systems (MEMS); Polysilicon films; Silicon; Tribology; Wear; Young's modulus of elasticity

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; FRICTION; HARDNESS; MICROELECTROMECHANICAL DEVICES; PLASTIC FILMS; SEMICONDUCTING SILICON; SILICONES; SINGLE CRYSTALS; SURFACE ROUGHNESS; TRIBOLOGY; WEAR RESISTANCE;

FRICTION FORCE MICROSCOPY; INDENTATION HARDNESS;

SEMICONDUCTING FILMS;

EID: 0030282664     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80099-4     Document Type: Article

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