Effect of surface chemistry on the tribological performance of a MEMS electrostatic lateral output motor

Tribology Letters

Volumn 9, Issue 3-4, 2001, Pages 199-209

  Patton, Steven T ^a   Cowan, William D ^b   Eapen, Kalathil C ^a   Zabinski, Jeffrey S ^b  

^a UNIVERSITY OF DAYTON RESEARCH INSTITUTE   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Adsorbed water; Mems tribology; Self assembled monolayer; Surface chemistry; Wear

Indexed keywords

EID: 0037658047     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1018817123441     Document Type: Article

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