Nanoscale manufacturing enabled by imprint lithography

MRS Bulletin

Volumn 33, Issue 9, 2008, Pages 854-863

  Sreenivasan, S V ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

DIGITAL STORAGE; MAGNETIC STORAGE; MANUFACTURE; NANOIMPRINT LITHOGRAPHY; NANOTECHNOLOGY;

IMPRINT LITHOGRAPHY; LITHOGRAPHY PROCESS; LONG RANGE ORDERS; MOLECULAR MEMORY; NANOPATTERNING TECHNIQUES; NANOSCALE APPLICATIONS; NANOSCALE MANUFACTURING; PROCESS THROUGHPUT;

LITHOGRAPHY;

EID: 52649112727     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2008.181     Document Type: Article

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