Superposition model for dielectric charging of RF MEMS capacitive switches under bipolar control-voltage waveforms

IEEE Transactions on Microwave Theory and Techniques

Volumn 55, Issue 12, 2007, Pages 2911-2918

  Peng, Zhen ^a,b   Yuan, Xiaobin ^a,c   Hwang, James C M ^a,b   Forehand, David I ^a,d   Goldsmith, Charles L ^a,d  

^a IEEE   (United States)

^b Lehigh University   (United States)

^c IBM RESEARCH   (United States)

^d MEMtronics Inc   (United States)

Author keywords

Charge injection; Dielectric films; Dielectric materials; Microelectromechanical devices; Switches

Indexed keywords

BIPOLAR WAVEFORMS; CAPACITIVE SWITCHES; CONTROL VOLTAGE WAVEFORMS; DIELECTRIC CHARGING;

CAPACITANCE; CHARGE INJECTION; DIELECTRIC FILMS; ELECTRIC CURRENTS; MATHEMATICAL MODELS; MEMS; VOLTAGE CONTROL; WAVEFORM ANALYSIS;

ELECTRIC SWITCHES;

EID: 36949039899     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2007.909475     Document Type: Conference Paper

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