Experimental characterization of stiction due to charging in RF MEMS

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2002, Pages 901-904

  Van Spengen, W Merlijn ^a,b   Puers, Robert ^b   Mertens, Robert ^a,b   De Wolf, Ingrid ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; INTERFEROMETRY; PARAMETER ESTIMATION; STICTION;

CAPACITIVE SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 0036927888     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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3. DeNatale, J., et al. IEEE International Reliability Physics Symposium (IRPS) Proceedings 2002, p.116 - 117
4. Goldsmith, C. L., Z. Yao, S. Eshelman and D. Denniston, IEEE Microw. Guided W., Vol. 8, 1998, p, 269 - 271
5. Goldsmith, C. et al., International Microwave Symposium Digest, IEEE, Piscataway, NJ, USA; 2001, Vol.1, p. 227 - 230
6. Yao, J. J., J. Micromech. Microeng. Vol. 10, 2000, p. R9 - R39
7. Rottenberg, X., et al., Proc. European Microwave Conference (EUMC), Milan, Italy, 2002
8. th International Symposium on Testing and Failure Analysis (ISTFA), 2001, p. 357 - 364