Investigation of stiction effect in electrostatic actuated RF mems devices

2007 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF07

Volumn , Issue , 2007, Pages 173-176

  Melle S ^b   Bordas, C ^a   Dubuc, D ^a   Grenier, K ^a   Vendier, O ^b   Muraro, J L ^b   Cazaux, J L ^b   Plana, R ^a  

^a LAAS CNRS   (France)

^b THALES ALENIA SPACE   (France)

Author keywords

Failure mode; Reliability; RF MEMS; Stiction

Indexed keywords

DIELECTRIC DEVICES; ELECTROSTATIC ACTUATORS; STICTION; THRESHOLD VOLTAGE;

FAILURE DETECTION; FAILURE MODE; MEMS RELIABILITY; RF MEMS;

MEMS;

EID: 34547261882     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMIC.2007.322787     Document Type: Conference Paper

References (6)

1. G.M.Rebeiz, J.B.Muldavin, ''RF MEMS switches and switch circuits", IEEE Microwave magazine, pp. 59-71, Dec. 2001.
2. R.Reid, "Dielectric charging effects on capacitive MEMS actuators", presented at 2002 IEEE MTT-S Int. Microwave Symp. Dig., Seattle, USA, June 2002.
3. S. Mellé, D. De Conto, L. Mazenq, D. Dubuc, K. Grenier, L. Bary, O. Vendier, J.L. Muraro, J.L. Cazaux and R. Plana, "Modeling of the dielectric charging kinetic for capacitive RF MEMS", 2005 IEEE MTT-S Int., Microwave Symp. Dig., Long Beach, USA, June 2005.
4. S.Mellé, D.De Conto, D.Dubuc, K.Grenier, O.Vendier, J.L.Muraro, J.L.Cazaux, R.Plana, "Reliability Modeling of capacitive RF-MEMS", IEEE Transactions on Microwave Theory and Techniques, Nov. 2005.
5. X.Rottenberg, B.Nauwelaers, W.De Raedt, H.A.C Tilmans, "Novel 2D+ model for the impact of the dielectric charge distribution on the electrostatic actuation of RF MEMS devices", Proc. 34th European Microwave Conf., Amsterdam, Netherlands, Oct, 2004, pp. B11-B14.
6. X.Yuan, S. Cherepko, J.Hwang, C.L.Goldsmith, C.Nordquist and C.Dyck, "Initial observation and analysis of dielectric-charging effects on RF MEMS capacitive switches", 2004 IEEE MTT-S Int. Microwave Symp. Dig., Fort Worth, USA, Jun. 2004, pp. 1943-1946.