Dielectric charge measurements in capacitive microelectromechanical switches

Applied Physics Letters

Volumn 89, Issue 10, 2006, Pages

  Molinero, D ^a   Comulada, R ^a,b   Castaner L ^a  

^a UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^b Baolab Microsystems SL   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC CHARGE; ELECTRIC CONDUCTIVITY; MICROELECTROMECHANICAL DEVICES; PERMITTIVITY; TRANSIENTS;

CHARGE AMOUNT; CHARGE MEASUREMENTS; ION GUN; MICROELECTROMECHANICAL SWITCHES;

SWITCHING NETWORKS;

EID: 33748492118     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2335799     Document Type: Article

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