Initial observation and analysis of dielectric-charging effects on RF MEMS capacitive switches

IEEE MTT-S International Microwave Symposium Digest

Volumn 3, Issue , 2004, Pages 1943-1946

  Yuan, Xiaobin ^a   Cherepko, Sergey ^a   Hwang, James ^a   Goldsmith, Charles L ^b   Nordquist, Christopher ^c   Dyck, Christopher ^c  

^a LEHIGH UNIVERSITY   (United States)

^b MEMtronics Inc   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Charging; Dielectric; MEMS; RF; Switch; Trap

Indexed keywords

CHARGING; DIELECTRIC; MEMS; RF; TRAP;

CAPACITANCE; CHARGING (BATTERIES); DIELECTRIC DEVICES; ELECTRIC CHARGE; ELECTRIC FIELDS; REAL TIME SYSTEMS; STRESS ANALYSIS; VOLTAGE MEASUREMENT;

ELECTRIC SWITCHES;

EID: 4544362468     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2004.1338990     Document Type: Conference Paper

References (5)

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