Dielectric charging of RF MEMS capacitive switches under bipolar control-voltage waveforms

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2007, Pages 1817-1820

  Peng, Zhen ^a,b   Yuan, Xiaobin ^a,c   Hwang, James C M ^a,b   Forehand, David I ^a,d   Goldsmith, Charles L ^a,d  

^a IEEE

^b LEHIGH UNIVERSITY   (United States)

^c IBM   (United States)

^d MEMtronics Inc   (United States)

Author keywords

Charge injection; Dielectric films; Dielectric materials; Microelectromechanical devices; Switches

Indexed keywords

CHARGE INJECTION; DIELECTRIC FILMS; MEMS; MICROELECTROMECHANICAL DEVICES;

BIPOLAR CONTROL-VOLTAGE WAVEFORMS; DIELECTRIC CHARGING;

ELECTRIC SWITCHES;

EID: 34748871396     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2007.380102     Document Type: Conference Paper

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