Effect of space charge polarization in radio frequency microelectromechanical system capacitive switch dielectric charging

Applied Physics Letters

Volumn 89, Issue 10, 2006, Pages

  Papaioannou, G J ^a   Exarchos, M ^a   Theonas, V ^a   Psychias, J ^b   Konstantinidis, G ^b   Vasilache, D ^c   Muller, A ^c   Neculoiu, D ^c  

^a UNIVERSITY OF ATHENS   (Greece)

^b INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^c NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CAPACITANCE; DIELECTRIC MATERIALS; ELECTRIC CHARGE; MICROELECTROMECHANICAL DEVICES; POLARIZATION; THERMAL EFFECTS; TRANSIENTS;

CHARGING MECHANISM; DIELECTRIC LAYER; EXPONENTIAL PROCESS; RADIO FREQUENCY;

SWITCHING NETWORKS;

EID: 33748494480     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2347278     Document Type: Article

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