Non-charge related mechanism affecting capacitive MEMS switch lifetime

IEEE Microwave and Wireless Components Letters

Volumn 16, Issue 3, 2006, Pages 140-142

  Kucko, Jay F ^a,b   Petrosky, James C ^a,b   Reid, J Robert ^a,c   Yeo, Yung Kee ^b  

^a IEEE   (United States)

^b AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

^c AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Dielectric charging; Micro machining; Microelectromechanical system (MEMS); Microwave; Millimeterwave; Reliability

Indexed keywords

CHARGE TUNNELING; DIELECTRIC CHARGING; INSULATOR SURFACE; SWITCH LIFETIME;

ELECTRIC INSULATORS; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; MICROMACHINING; MICROWAVES; MILLIMETER WAVES; RELIABILITY;

MICROELECTROMECHANICAL DEVICES;

EID: 33644988089     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2006.869796     Document Type: Article

References (7)

1. J. Wibbeler, G. Pfeifer, and M. Hietschold, "Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)," Sen. Actuators A, vol. 71, no. 1-2, pp. 74-80, Nov. 1998.
2. C. Goldsmith, J. Ehmke, A. Malczewski, B. Pillans, S. Eshelman, Z. Yao, J. Brank, and M. Eberly, "Lifetime characterization of capacitive RF MEMS switches," in IEEE MTT-S Tech. Dig., Phoenix, AZ, Jun. 2001. pp. 227-230.
3. J. R. Reid, "Capacitive switch reliability issues," in GOMAC 2002 Tech. Dig., Monterey, CA, Mar. 2002, pp. 48-51.
4. J. R. Reid and R. T. Webster, "Measurement of charging in capacitive microelectomechanical switches," Electron, Lett., vol. 38, no. 24, Nov. 2002.
5. J. R. Reid, "Simulation and measurement of dielectric charging in electrostatically actuated capacitive microwave switches," in Proc. Modeling Simul. Microsyst., San Juan, Puerto Rico, Apr. 2002, pp. 250-253.
6. 4 thin films," Solid-State Electron., vol. 30, no. 12, pp. 1295-1301, Dec. 1987.
7. X. Rottenberg, B. Nauwelaers, W. De Raedt, and H.A.C. Tilmans, "Distributed dielectric charging and its impact on RF MEMS devices," in GAAS 12th Symp. Dig., Amsterdam, The Netherlands, 2004, pp. 475-478.