Characterization of dielectric charging in RF MEMS capacitive switches

IEEE International Conference on Microelectronic Test Structures

Volumn 2006, Issue , 2006, Pages 133-136

  Herfst, R W ^a   Huizing, H G A ^a   Steeneken, P G ^a   Schmitz, J ^b  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE SWITCHES; DIELECTRIC LAYER; PULL-IN VOLTAGE; STRESS VOLTAGE;

CAPACITANCE; DIELECTRIC PROPERTIES; ELECTRIC CHARGE; ELECTRIC FIELD EFFECTS; ELECTRIC SWITCHES; WIRELESS TELECOMMUNICATION SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 33749523917     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMTS.2006.1614290     Document Type: Conference Paper

References (7)

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2. E.K. Chan, K. Garikipati, and R.W. Dutton, Characterization of contact electromechanics through capacitance-voltage measurements and simulations, J. Microelectromechanical Systems, vol. 8, no. 2, 208-217, June 1999
3. W. Merlijn van Spengen, Robert Puers, Robert Mertens, and Ingrid De Wolf, A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches, J. Micromech. Microeng, vol. 14, 514-521, 2004.
4. Xiaobin Yuan, James C.M. Hwang, David Forehand, and CHrles L. Goldsmith, Modeling and characterization of Dielectric-Charging Effects in RF MEMS Capacitive Switches, 2005 IEEE MTT-S International Microwave Symposium Digest.
5. S. Meilé, D. De Conto, L. Mazenq, D. Dubuc, K. Grenier, L. Bary, O. Vendier, J.L. Muraro, J.L. Cazaux, and R. Plana, Modeling of the dielectric charging kinetic for capacitiv RF-MEMS, 2005 IEEE MTT-S International Microwave Symposium Digest.
6. Xiaobin Yuan, Sergey Cherepko, James Hwang, Charles L. Goldsmith, Christopher Nordquist, and Christopher Dyck, Initial Observation and Analysis of Dielectric-Charging Effects on RF MEMS Capacitive Switches, 2004 IEEE MTT-S International Microwave Symposium Digest.
7. J. Robert Reid, Richard T. Webster, and LaVern A. Starman, Noncontact Measurement of Charge Induced Voltage Shift in Capacitive MEM-Switches, IEEE Microwave and Wireless Components Letters, vol. 13, no. 9, September 2003.