Temperature acceleration of dielectric charging in RF MEMS capacitive switches

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2006, Pages 47-50

  Yuan, Xiaobin ^a,b   Peng, Zhen ^a,b   Hwang, James C M ^a,b   Forehand, David ^a,c   Goldsmith, Charles L ^a,c  

^a IEEE   (United States)

^b LEHIGH UNIVERSITY   (United States)

^c MEMtronics Inc   (United States)

Author keywords

Charging; Dielectric; MEMS; RF; Switch; Temperature acceleration; Trap

Indexed keywords

DIELECTRIC CHARGING; DISCHARGING TRANSIENT; RF SWITCHES; TEMPERATURE ACCELERATION;

DIELECTRIC MATERIALS; MICROWAVES; SWITCHES; THERMAL EFFECTS;

MEMS;

EID: 33845528032     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2006.249923     Document Type: Conference Paper

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