Measurements of charging in capacitive microelectromechanical switches

Electronics Letters

Volumn 38, Issue 24, 2002, Pages 1544-1545

  Reid, J R ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC CHARGE MEASUREMENT; ELECTRIC CONDUCTORS; ELECTRIC POWER SUPPLIES TO APPARATUS; ELECTRODES; MICROELECTROMECHANICAL DEVICES; PERMITTIVITY; SILICON NITRIDE; VOLTAGE CONTROL; WAVEGUIDES;

CAPACITANCE-VOLTAGE CURVE; ELECTRODE-DIELECTRIC INTERFACE; MICROELECTROMECHANICAL SWITCH; MICROPROBE STATION; OPTICAL MICRO-PHOTOGRAPH; UNIPOLAR CYCLING; WAFER PROBING;

SEMICONDUCTOR SWITCHES;

EID: 0037153503     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20021071     Document Type: Article

References (3)

1. GOLDSMITH, C., EHMKE, J., MALCZEWSKI, A., PILLANS, B., ESHELMAN, S., YAO, Z., BRANK, J., and EBERLY, M.: 'Lifetime characterization of capacitive RF MEMS switches'. IEEE MTT-S Int. Microwave Symp. Dig., 2001, Vol. 1, pp. 227-230
2. CHAN, E., GARIKIPATI, K., and DUTTON, R.: 'Characterization of contact electromechanics through capacitance-voltage measurements and simulations', J. Microelectromech. Syst., 1999, 8, (2), pp. 208-217
3. REID, J.: 'Simulation and measurement of dielectric charging in electrostatically actuated capacitive microwave switches'. Proc. Modeling and Simulation of Microsystems, San Juan, Puerto Rico, April 2002, pp. 250-253