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Volumn 99, Issue 9, 2006, Pages

Effects of dielectric charging on fundamental forces and reliability in capacitive microelectromechanical systems radio frequency switch contacts

(2) Patton, Steven T a Zabinski, Jeffrey S b

a UNIVERSITY OF DAYTON (United States)

b AIR FORCE RESEARCH LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROELECTROMECHANICAL SYSTEMS; DIELECTRIC CHARGING; METAL-TO-DIELECTRIC CONTACTS; RADIO FREQUENCY SWITCH CONTACTS;

ACTUATORS; AEROSPACE APPLICATIONS; DIELECTRIC MATERIALS; ELECTRIC FIELD EFFECTS; ELECTROSTATICS; MILITARY APPLICATIONS; RADIO FREQUENCY AMPLIFIERS; RELIABILITY; SILICON NITRIDE; VOLTAGE CONTROL;

MICROELECTROMECHANICAL DEVICES;

EID: 33646881555 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2194125 Document Type: Article

Times cited : (33)

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