On the dielectric polarization effects in capacitive RF-MEMS switches

IEEE MTT-S International Microwave Symposium Digest

Volumn 2005, Issue , 2005, Pages 761-764

  Papaioannou, G J ^a   Exarchos, M ^a   Theonas, V ^a   Wang, G ^b   Papapolymerou, J ^b  

^a UNIVERSITY OF ATHENS   (Greece)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Dielectric charging; Polarization effects; Reliability; RF MEMS switches

Indexed keywords

CAPACITORS; DIELECTRIC PROPERTIES; DIELECTRIC RELAXATION; ELECTRIC CHARGE; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; POLARIZATION;

CHARGE INJECTIONS; DIELECTRIC CHARGING; POLARIZATION EFFECTS; RF MEMS SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 33749236096     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2005.1516723     Document Type: Conference Paper

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