Prominent defects in semi-insulating SiC substrates

Physica B: Condensed Matter

Volumn 401-402, Issue , 2007, Pages 67-72

  Son, N T ^a   Carlsson, P ^a   Gallstrom A ^a   Magnusson, B ^b   Janzen E ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b Norstel AB   (Sweden)

Author keywords

Deep level; Electron paramagnetic resonance; Intrinsic defect; Semi insulating

Indexed keywords

ANNEALING; CARBON; PARAMAGNETIC RESONANCE; SUBSTRATES; THERMAL ENERGY; VANADIUM;

DEEP LEVEL; HIGH-PURITY SEMI-INSULATING (HPSI); INTRINSIC DEFECT; SEMI-INSULATING;

SILICON COMPOUNDS;

EID: 36048952428     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2007.08.115     Document Type: Article

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